FS1015CL series gas mass flow sensors are specially designed for the measurement and process control of various medical gases. The product is made by the company's self-developed micro-electromechanical system (MEMS) flow sensor chip, which is suitable for all kinds of clean gases. Low cost, easy to install, no need for temperature and pressure compensation, it can replace the traditional flowmeter of volumetric or differential pressure type. The measuring range is up to 150SLPM, and the ISO15mm connection method is suitable for various medical equipment such as ventilators and anesthesia machines.